Method of making a semiconductor chip assembly with a conductive trace subtractively formed before and after chip attachment

ABSTRACT

A method of manufacturing a semiconductor chip assembly includes providing a semiconductor chip and a conductive metal, wherein the chip includes a conductive pad, the conductive metal includes a dimple, and the pad is aligned with the dimple, etching the conductive metal on a side opposite the dimple such that the dimple forms a through-hole in the conductive metal, and forming a connection joint in the through-hole that electrically connects the conductive metal and the pad. The method may include mechanically attaching the chip to the conductive metal using an adhesive before forming the through-hole, and forming an opening in the adhesive directly beneath the through-hole thereby exposing the pad after mechanically attaching the chip to the conductive metal and before forming the connection joint.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor chip assembly, and more particularly to a semiconductor chip assembly in which a semiconductor chip is mechanically and electrically connected to a support circuit.

2. Description of the Related Art

Semiconductor chips have input/output pads that must be connected to external circuitry in order to function as part of an electronic system. The connection media is typically an array of metallic leads (e.g., a lead frame) or a support circuit (e.g., a substrate), although the connection can be made directly to a circuit panel (e.g., a mother board). Several connection techniques are widely used. These include wire bonding, tape automated bonding (TAB) and flip-chip bonding. Wire bonding is by far the most common. In this approach, wires are bonded, one at a time, from the chip to external circuitry by ultrasonic, thermocompression or thermosonic processes. TAB involves bonding gold-bumped pads on the chip to external circuitry on a polymer tape using thermocompression bonding. Both wire bonding and TAB require mechanical force such as pressure or a burst of ultrasonic vibration and elevated temperature to accomplish metallurgical welding between the wires or bumps and the designated surface.

Flip-chip bonding involves providing pre-formed solder bumps on the pads, flipping the chip so that the pads face down and are aligned with and contact matching bond sites, and melting the solder bumps to wet the pads and the bond sites. After the solder reflows it is cooled down and solidified to form solder joints between the pads and the bond sites. Organic conductive adhesive bumps with conductive fillers in polymer binders have been used in place of solder bumps, but they do not normally form a metallurgical interface in the classical sense. A major advantage of flip-chip bonding over wiring bonding and TAB is that it provides shorter connection paths between the chip and the external circuitry, and therefore has better electrical characteristics such as less inductive noise, cross-talk, propagation delay and waveform distortion. In addition, flip-chip bonding requires minimal mounting area and weight which results in overall cost saving since no extra packaging and less circuit board space are used.

While flip chip technology has tremendous advantages over wire bonding and TAB, its cost and technical limitations are significant. For instance, the cost of forming bumps on the pads is significant. In addition, an adhesive is normally underfilled between the chip and the support circuit to reduce stress on the solder joints due to thermal mismatch between the chip and the support circuit, and the underfilling process increases both manufacturing complexity and cost. Furthermore, the solder joints exhibit increased electrical resistance as well as cracks and voids over time due to fatigue from thermo-mechanical stresses. Finally, the solder is typically a tin-lead alloy and lead-based materials are becoming far less popular due to environmental concerns over disposing of toxic materials and leaching of toxic materials into ground water supplies.

Other techniques besides wire bonding, TAB and flip-chip bonding have been developed to connect chips to external circuitry without using wires, leads or bumps. Such techniques include thin film rerouting at the wafer, panel or module level, and attaching a pre-patterned substrate to the chip such that through-holes in the substrate expose the pads and selectively applying conductive material into the through-holes. Several approaches are described below.

A typical thin film routing approach includes depositing a dielectric material on the chip, providing through-holes in the dielectric material that expose the pads, providing metallization in the through-holes that contacts the pads, and providing a top layer of conductive circuitry on the dielectric material that contacts the metallization. In this manner, the additional circuitry is fabricated on the chip. Drawbacks to this approach include complicated manufacturing requirements, high cost, and chip loss if the additional circuitry is defective. In particular, since the chip or wafer provides a substrate for the additional circuitry, chips will be lost if the additional circuitry fails to achieve certain quality and yield criteria. Unpredictable chip loss has prevented the wide spread adoption of this “chip first” approach in volume production. Furthermore, if the process is not performed on wafers, the commercially available silicon wafer processing equipment may not be compatible with common tooling and handling techniques.

U.S. Pat. No. 5,407,864 discloses providing a partially assembled printed circuit board (PCB) with buried conductive traces and through-holes that expose portions of the conductive traces, attaching the PCB to the chip using an adhesive, removing portions of the adhesive exposed by the through-holes to expose the pads, depositing a blanket conductive layer over the PCB which covers the pads and sidewalls of the through-holes without filling the through-holes, depositing a blanket insulative layer over the PCB which fills the remaining space in the through-holes, polishing the PCB to remove the conductive layer and the insulative layer from the top surface, and providing circuitry at the top surface that is connected to the conductive traces. In this manner, the circuitry at the top surface is connected to the pads through the conductive traces and portions of the conductive layer in the through-holes. Since, however, the conductive layer is blanket deposited over the entire PCB, polishing is used to remove the conductive layer from the top surface of the PCB since it would otherwise short the pads together. Polishing the conductive layer is costly and time consuming. Another drawback is that the polishing completely removes the top layer of the PCB, and therefore subsequent processes such as masking, circuitization and bumping are necessary for fabricating top surface circuitry such as traces and terminals for the next level assembly.

U.S. Pat. No. 6,037,665 discloses providing a chip with solder bumped pads, providing a pre-patterned multi-layer substrate with pre-metallized through-holes aligned with the pads, filling solder from the bumped pads into the through-holes, and reflowing the solder to form solder joint connections with the pads. This approach is similar to flip-chip bonding except that the solder is filled into the through-holes instead of merely being disposed between the chip and the substrate. Drawbacks to this approach include the need to solder bump the chip as well as the disadvantages of solder joints discussed above.

U.S. Pat. No. 5,116,463 discloses attaching a multi-layer substrate to a chip that includes forming through-holes through a dielectric layer that extend to the pads and electrolessly plating metal into the through-holes. The electroless plating is initiated by the pads and continues until the deposited metal fills the through-holes and contacts metalization on the top surface of the substrate. Drawbacks to this approach include the need for the metallization on the top surface to provide endpoint detection and the possibility that electroless plating on the metallization on the top surface adjacent to the top of the through-hole may close the through-hole before the electroless plating fills the through-hole.

U.S. Pat. No. 5,556,810 discloses inner leads laminated by an organic film and attached to a chip by an adhesive. Distal ends of the inner leads are positioned near the pads and then electrically connected to the pads by L-shaped plated metal. However, since the inner leads are flexible and vary in height and length, the inner leads may not be positioned precisely and uniformly, the gaps between the distal ends and the respective pads can vary, and consequently the plated metal joints may be weak or open. Furthermore, if the chip has moderate to high pad density and a separate power/ground plane is needed to achieve better electrical performance, the single layer inner leads may not be suitable. In addition, handling of this leaded-chip for the next level assembly such as outer lead bonding or board level assembly can be problematic since the leads are soft and easily bent, rendering it difficult to maintain co-planarity among the leads during the next level assembly.

Recent introduction of grid array packaging (e.g., ball grid arrays), chip size packages (CSP) and flip-chip packages using high density interconnect substrates are relentlessly driving increased printed circuit board density. Shrinking traces and spaces and increasing layer count increase printed circuit board density, however reducing the size of plated through-holes can even more significantly increase printed circuit board density. Small through-holes allow more routing space so that more conductive lines can be placed between the through-holes. Small through-holes also increase design flexibility and reduce design cycle time and overall product introduction time.

Conventional printed circuit boards have drilled through-holes with a size (diameter) in the range of 200 to 400 microns. As drilling technology improves, the drilled through-hole size is anticipated to reach 100 microns. Moreover, recently developed methods for forming through-holes using a punch, plasma or laser have driven down through-hole size to the range of 50 microns or less. A typical chip pad has a length and width on the order of 50 to 100 microns. Since the through-holes allow the pads to interconnect with various circuitry layers, using through-holes with similar sizes to the pads is desirable. The major advantage of using metallization in through-holes to interconnect the pads is that it replaces external media such as wires, bumps and leads.

The semiconductor chip assembly is subsequently connected to another circuit such as a PCB or mother board during next level assembly. Different semiconductor assemblies are connected to the next level assembly in different ways. For instance, ball grid array (BGA) packages contain an array of solder balls, and land grid array (LGA) packages contain an array of metal pads that receive corresponding solder traces on the PCB. However, since BGA and LGA packages are connected to the PCB by solder joints, the compliance is small and solder joint reliability problems exist. Plastic quad flat pack (PQFP) packages have a lead frame formed into a gull-wing shape. When the PQFP is assembled on a PCB, this gull-wing lead serves as the contact terminal which provides compliance and reduces stress on the solder joints. However, drawbacks to PQFP packages include the large size of the lead and poor high frequency electrical characteristics.

Thermo-mechanical wear or creep of the solder joints that connect the semiconductor chip assembly to the next level assembly is a major cause of failure in most board assemblies. This is because non-uniform thermal expansion and/or contraction of different materials causes mechanical stress on the solder joints.

Thermal mismatch induced solder joint stress can be reduced by using materials having a similar coefficient of thermal expansion (CTE). However, due to large transient temperature differences between the chip and other materials during power-up of the system, the induced solder joint stress makes the assembly unreliable even when the chip and the other materials have closely matched thermal expansion coefficients.

Thermal mismatch induced solder joint stress can also be reduced by proper design of the support circuit. For instance, BGA and LGA packages have been designed with pillar post type contact terminals that extend above the package and act as a stand-off or spacer between the package and the PCB in order to absorb thermal stress and reduce solder joint fatigue. The higher the aspect ratio of the pillar, the more easily the pillar can flex to follow expansion of the two ends and reduce shear stress.

Conventional approaches to forming the pillar either on a wafer or a separate support circuit include a bonded interconnect process (BIP) and plating using photoresist.

BIP forms a gold ball on a pad of the chip and a gold pin extending upwardly from the gold ball using a thermocompression wire bonder. Thereafter, the gold pin is brought in contact with a molten solder bump on a support circuit, and the solder is reflowed and cooled to form a solder joint around the gold pin. A drawback to this approach is that when the wire bonder forms the gold ball on the pad it applies substantial pressure to the pad which might destroy active circuitry beneath the pad. In addition, gold from the pin can dissolve into the solder to form a gold-tin intermetallic compound which mechanically weakens the pin and therefore reduces reliability.

U.S. Pat. No. 5,722,162 discloses fabricating a pillar by electroplating the pillar on a selected portion of an underlying metal exposed by an opening in photoresist and then stripping the photoresist. Although it is convenient to use photoresist to define the location of the pillar, electroplating the pillar in an opening in the photoresist has certain drawbacks. First, the photoresist is selectively exposed to light that initiates a reaction in regions of the photoresist that correspond to the desired pattern. Since photoresist is not fully transparent and tends to absorb the light, the thicker the photoresist, the poorer the penetration efficiency of the light. As a result, the lower portion of the photoresist might not receive adequate light to initiate or complete the intended photo-reaction. Consequently, the bottom portion of the opening in the photoresist might be too narrow, causing a pillar formed in the narrowed opening to have a diameter that decreases with decreasing height. Such a pillar has a high risk of fracturing at its lower portion in response to thermally induced stress. Second, if the photoresist is relatively thick (such as 100 microns or more), the photoresist may need to be applied with multiple coatings and receive multiple light exposures and bakes, which increases cost and reduces yield. Third, if the photoresist is relatively thick, the electroplated pillar may be non-uniform due to poor current density distribution in the relatively deep opening. As a result, the pillar may have a jagged or pointed top surface instead of a flat top surface that is better suited for providing a contact terminal for the next level assembly.

In view of the various development stages and limitations in currently available semiconductor chip assemblies, there is a need for a semiconductor chip assembly that is cost-effective, reliable, manufacturable, provides excellent mechanical and electrical performance, and complies with stringent environmental standards.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a semiconductor chip assembly with a chip and a support circuit that provides a low cost, high performance, high reliability package.

Another objective of the present invention is to provide a convenient, cost-effective method for manufacturing semiconductor chip assemblies as chip size packages, ball grid arrays or other structures.

In accordance with one aspect of the invention, a method of manufacturing a semiconductor chip assembly includes providing a semiconductor chip and a conductive metal, wherein the chip includes a conductive pad, the conductive metal includes a dimple, and the pad is aligned with the dimple, etching the conductive metal on a side opposite the dimple such that the dimple forms a through-hole in the conductive metal, and forming a connection joint in the through-hole that electrically connects the conductive metal and the pad.

Preferably, the method includes mechanically attaching the chip to the conductive metal using an adhesive before forming the through-hole, and forming an opening in the adhesive directly beneath the through-hole thereby exposing the pad after mechanically attaching the chip to the conductive metal and before forming the connection joint.

The method may also include etching partially but not completely through the conductive metal to form the dimple and outer edges of a routing line, and then etching partially but not completely through the conductive metal on the opposite side to form a top surface of the routing line and convert the dimple into the through-hole.

The method may also include encapsulating the chip after mechanically attaching the chip to the conductive metal and before etching the conductive metal to convert the dimple into the through-hole.

The method may also include forming an insulative base over the routing line and the through-hole that does not extend to the top surface of the conductive trace.

The method may further include etching the conductive metal on the opposite side to form a pillar, either before or after forming the connection joint.

An advantage of the present invention is that the semiconductor chip assembly need not include wire bonds, TAB leads or solder joints. Another advantage is that the pillar is formed using etching (i.e., subtractively) rather than by electroplating or electroless plating (i.e., additively) which improves uniformity and reduces manufacturing time and cost. Another advantage is that the assembly can be manufactured using low temperature processes which reduces stress and improves reliability. A further advantage is that the assembly can be manufactured using well-controlled wet chemical processes which can be easily implemented by circuit board, lead frame and tape manufacturers. Still another advantage is that the assembly can be manufactured using materials that are compatible with copper chip and lead-free environmental requirements.

These and other objects, features and advantages of the invention will be further described and more readily apparent from a review of the detailed description of the preferred embodiments which follows.

BRIEF DESCRIPTION OF THE DRAWINGS

The following detailed description of the preferred embodiments can best be understood when read in conjunction with the following drawings, in which:

FIGS. 1A-1N are cross-sectional views showing a method of manufacturing a semiconductor chip assembly in accordance with an embodiment of the present invention;

FIGS. 2A-2N are top plan views corresponding to FIGS. 1A-1N, respectively;

FIGS. 3A-3N are bottom plan views corresponding to FIGS. 1A-1N, respectively;

FIGS. 4A-4R are cross-sectional views showing a method of manufacturing a semiconductor chip assembly in accordance with another embodiment of the present invention;

FIGS. 5A-5R are top plan views corresponding to FIGS. 4A-4R, respectively; and

FIGS. 6A-6R are bottom plan views corresponding to FIGS. 4A-4R, respectively.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

FIGS. 1A-1N, 2A-2N and 3A-3N are cross-sectional, top and bottom views, respectively, of a method of manufacturing a semiconductor chip assembly in accordance with an embodiment of the present invention.

FIGS. 1A, 2A and 3A are cross-sectional, top and bottom views, respectively, of semiconductor chip 10 which is an integrated circuit in which various transistors, circuits, interconnect lines and the like are formed (not shown). Chip 10 includes upper surface 12 and lower surface 14. Upper surface 12 includes conductive pad 16. Pad 16 is substantially aligned with the insulative housing of chip 10 so that upper surface 12 is essentially flat. Alternatively, if desired, pad 16 can extend above or be recessed below the insulative housing. Pad 16 provides a bonding site to electrically couple chip 10 with external circuitry. Thus, pad 16 can be an input/output pad or a power/ground pad. Pad 16 can have an aluminum base that serves as a surface layer, or alternatively, an aluminum base covered by a surface layer such as gold with an adhesion and/or barrier layer therebetween, depending on the nature of a connection joint that shall subsequently contact the pad. If desired, the aluminum base of pad 16 is cleaned by dipping chip 10 in a solution containing 0.05 M phosphoric acid at room temperature for 1 minute and then rinsed in distilled water before depositing the next layer on the aluminum base. Pad 16 has a length and width of 60 microns. Chip 10 includes many other pads on upper surface 12, and only pad 16 is shown for convenience of illustration. In addition, chip 10 is one of many chips on a wafer.

FIGS. 1B, 2B and 3B are cross-sectional, top and bottom views, respectively, of copper foil 20 which includes top surface 22 and bottom surface 24. Copper foil 20 has a thickness of 150 microns.

FIGS. 1C, 2C and 3C are cross-sectional, top and bottom views, respectively, of photoresist layer 26 formed on bottom surface 24 of copper foil 20. Photoresist layer 26 is deposited as a continuous layer and then patterned by selectively applying light through a reticle (not shown), applying a developer solution to remove the photoresist portions rendered soluble by the light, and then hard baking, as is conventional. As a result, photoresist layer 26 contains an opening (or openings) that selectively exposes portion 28 of bottom surface 24. Photoresist layer 26 has a thickness of 10 microns.

FIGS. 1D, 2D and 3D are cross-sectional, top and bottom views, respectively, of the outer edges of routing line 30 formed in copper foil 20 and dimple 32 formed in routing line 30. The outer edges of routing line 30 and dimple 32 are formed by applying a “back-side” wet chemical etch to exposed portion 28 of bottom surface 24 without applying the wet chemical etch to the opposite or front-side (top surface 22) of copper foil 20. For instance, the wet chemical etch can be sprayed on the back-side, or the front-side can be covered by a mask and then the structure can be dipped in the wet chemical etch. Thus, the outer edges of routing line 30 and dimple 32 are formed subtractively. A suitable wet chemical etch can be provided by a solution containing alkaline ammonia, sulfuric acid with hydrogen peroxide, chromic-sulfuric acid, phosphoric acid with ammonium persulfate, copper sulfate, copper chloride or ferric chloride.

The wet chemical etch does not etch completely through copper foil 20. Rather, the wet chemical etch etches partially through copper foil 20. In this instance, the wet chemical etch removes a lower thickness of 25 microns from copper foil 20 outside routing line 30 and inside routing line 30 at dimple 32. Since copper foil 20 is 150 microns thick, routing line 30 and dimple 32 each have a height of 25 microns and are covered by the unetched 125 micron thick upper portion of copper foil 20. Thus, routing line 30 and dimple 32 extend to bottom surface 24.

Routing line 30 includes an enlarged annular region 34 that surrounds dimple 32 and an enlarged circular region 36 that provides a base for a pillar that shall be subsequently formed. Routing line 30 has a width of 50 microns, enlarged annular region 34 has an outer diameter (at the periphery) of 150 microns, an inner diameter (at dimple 32) of 50 microns and an annular width (between the inner and outer diameters) of 50 microns ((150−50)/2), and enlarged circular region 36 has a diameter of 400 microns. The optimal etch time for exposing portion 28 of bottom surface 24 to the wet chemical etch in order to form the outer edges of routing line 30 and dimple 32 with the desired dimensions can be established through trial and error.

FIGS. 1E, 2E and 3E are cross-sectional, top and bottom views, respectively, of copper foil 20 after photoresist layer 26 is stripped.

FIGS. 1F, 2F and 3F are cross-sectional, top and bottom views, respectively, of insulative adhesive 40 on bottom surface 24 of copper foil 20. Adhesive 40 covers bottom surface 24, fills the recessed portion that surrounds routing line 30, fills dimple 32, and contacts the bottom of the unetched 125 micron upper portion of copper foil 20. Adhesive 40 is applied as an adhesive paste such as Ablestik ABELBOND™ 961-2™ using a stencil.

FIGS. 1G, 2G and 3G are cross-sectional, top and bottom views, respectively, of chip 10 mechanically attached to copper foil 20 by adhesive 40. Adhesive 40 is disposed between and contacts upper surface 12 of chip 10 and bottom surface 24 of copper foil 20. Thus, chip 10 and copper foil 20 do not contact one another. Preferably, adhesive 40 is sandwiched between upper surface 12 and bottom surface 24 using relatively low pressure while adhesive 40 is a paste. In addition, chip 10 and copper foil 20 are positioned relative to one another so that pad 16 is aligned with dimple 32. That is, at least a portion of pad 16, and preferably a majority of pad 16, is directly beneath dimple 32. Since the 60 micron length and width of pad 16 exceed the 50 micron diameter of dimple 32, all of pad 16 cannot be directly beneath dimple 32. Instead, a central portion of pad 16 is directly beneath dimple 32 and a peripheral portion of pad 16 is outside dimple 32. Pad 16 and dimple 32 can be aligned using an automated pattern recognition system. Thereafter, adhesive 40 is cured or hardened at relatively low temperature in the range of 100-300° C. to form a solid adhesive layer that is 10 microns thick between upper surface 12 and bottom surface 24 and mechanically fastens chip 10 to copper foil 20. At this stage, dimple 32 is covered from above by copper foil 20 and filled with and covered from below by adhesive 40, pad 16 is covered from above by adhesive 40, and pad 16 is separated from routing line 30 by the thickness of adhesive 40.

FIGS. 1H, 2H and 3H are cross-sectional, top and bottom views, respectively, of encapsulant 42 formed on lower surface 14 of chip 10. Preferably, encapsulant 42 is initially an epoxy in paste form that includes an epoxy resin, a curing agent, an accelerator and a filler. The filler is an inert material such as silica (powdered fused quartz) that provides thermal coefficient of expansion matching. The epoxy paste is coated onto lower surface 14 and then cured or hardened at relatively low temperature in the range of 100-250° C. to form a solid adherent protective layer. Encapsulant 42 provides back-side environmental protection such as moisture resistance and particle protection for chip 10 and has a thickness of 100 microns.

FIGS. 1I, 2I and 3I are cross-sectional, top and bottom views, respectively, of photoresist layer 44 formed on top surface 22 of copper foil 20. Photoresist layer 44 is deposited as a continuous layer and then patterned by selectively applying light through a reticle (not shown), applying a developer solution to remove the photoresist portions rendered soluble by the light, and then hard baking, as is conventional. As a result, photoresist layer 44 contains an opening that selectively exposes portion 46 of top surface 22. Photoresist layer 44 has a thickness of 10 microns.

FIGS. 1J, 2J and 3J are cross-sectional, top and bottom views, respectively, of the partially completed assembly after pillar 50 is formed in copper foil 20, the top surface of routing line 30 is formed, and dimple 32 is converted into through-hole 52 in routing line 30. The top surface of routing line 30, pillar 50 and through-hole 52 are formed by applying a “front-side” wet chemical etch to portion 46 of top surface 22 without applying the wet chemical etch to the opposite or back-side of copper foil 20. For instance, the structure can be dipped in the wet chemical etch since the back-side is protected by encapsulant 42. Thus, pillar 50 is formed subtractively. The wet chemical etch is highly selective of copper with respect to epoxy. Therefore, no appreciable amount of encapsulant 42 is removed. Likewise, after the wet chemical etch etches through portion 46 of top surface 22 and contacts adhesive 40 outside routing line 30 and beneath through-hole 52, no appreciable amount of adhesive 40 is removed. A suitable wet chemical etch can be provided by a solution containing alkaline ammonia, sulfuric acid with hydrogen peroxide, chromic-sulfuric acid, phosphoric acid with ammonium persulfate, copper sulfate, copper chloride or ferric chloride.

The wet chemical etch does not etch completely through copper foil 20. Rather, the wet chemical etch etches partially through copper foil 20. In this instance, the wet chemical etch removes a 125 micron thick upper portion of copper foil 20—the same upper portion that was not reached by the earlier back-side etch. Similarly, the wet chemical etch has no appreciable affect on the 25 micron thick lower portion of copper foil 20—the same lower portion that was subjected to the earlier back-side etch. Since the recessed portion of copper foil 20 outside routing line 30 was 125 microns thick, the wet chemical etch removes the portions of copper foil 20 outside routing line 30. In addition, since the portion of copper foil 20 directly above routing line 30 and dimple 32 was 125 microns, the wet chemical etch forms a top surface of routing line 30 that is contiguous with the outer edges of routing line 30 and converts dimple 32 into through-hole 52 that extends between the top and bottom surfaces of routing line 30. Thus, routing line 30 and dimple 32 each have a thickness or height of 25 microns. Pillar 50 extends to top surface 22 whereas routing line 30 and through-hole 52 do not. Furthermore, since the wet chemical etch undercuts (i.e., laterally etches) copper foil 20 beneath photoresist layer 44, pillar 50 tapers inwardly with increasing height. A suitable taper is between 45 and slightly less than 90 degrees, such as approximately 75 degrees. Pillar 50 has a diameter of 400 microns at its base at enlarged circular region 36 that decreases with increasing height and is narrowest at top surface 22. Furthermore, pillar 50 has a flat top surface at what remains of top surface 22. The optimal etch time for exposing portion 46 of top surface 22 to the wet chemical etch in order to form routing line 30, pillar 50 and through-hole 52 with the desired dimensions can be established through trial and error.

Pillar 50 is horizontally offset from through-hole 52, and routing line 30 provides horizontal routing (fan-in or fan-out) between pillar 50 and through-hole 52. Routing line 30 and pillar 50 in combination provide conductive trace 54 that is adapted for providing horizontal and vertical routing between pad 16 and a terminal on a printed circuit board (not shown) above top surface 22 in a subsequent next level assembly. Advantageously, conductive trace 54 is a single continuous copper segment that is devoid of plated copper. At this stage, adhesive 40 provides critical mechanical support for conductive trace 54 which would otherwise be a dangling lead.

FIGS. 1K, 2K and 3K are cross-sectional, top and bottom views, respectively, of opening 56 formed in adhesive 40. In particular, any adhesive 40 in through-hole 52 is removed, and a portion of adhesive 40 directly below through-hole 52 is also removed to form opening 56. As a result, the combination of through-hole 52 and opening 56 extend through routing line 30 and adhesive 40, respectively, and expose pad 16. Opening 56 can be provided by applying a suitable etch that is highly selective of adhesive 40 with respect to pad 16 and conductive trace 54. The preferred etch depends on the thickness of adhesive 40.

In this instance, a selective laser etch is applied. Using projection laser ablation, a metal mask (not shown) is positioned above top surface 22 such that an opening in the metal mask is aligned with through-hole 52, and a laser is directed to the side of the metal mask opposite top surface 22. Accordingly, the metal mask targets the laser at through-hole 52. After the laser removes whatever adhesive 40 is inside or directly below through-hole 52, the laser strikes pad 16. In addition, the laser strikes a portion of the top surface of enlarged annular region 34 adjacent to through-hole 52 due to registration and alignment inaccuracies. However, the laser does not strike outside enlarged annular region 34, nor does the laser deform or remove an appreciable amount of pad 16 or enlarged annular region 34. Instead, pad 16 and enlarged annular region 34 provide an etch stop for the laser. As a result, the laser essentially provides an extension or pattern transfer of through-hole 52 through adhesive 40. Through-hole 52 and opening 56 have essentially identical diameters, are axially aligned with one another, and together expose pad 16.

FIGS. 1L, 2L and 3L are cross-sectional, top and bottom views, respectively, of the partially completed assembly after connection joint 60 is formed. Connection joint 60 is formed in through-hole 52, extends through opening 56 in adhesive 40, and contacts pad 16 and routing line 30, thereby electrically connecting pad 16 and routing line 30. In particular, connection joint 60 contacts the central portion of pad 16 directly beneath through-hole 52, the sidewalls of through-hole 52, the top surface of routing line 30, and the sidewalls of pillar 50. However, photoresist layer 44 prevents connection joint 60 from contacting top surface 22.

For illustration purposes, connection joint 60 is formed by an electroplating operation. Initially, a plating bus (not shown) is connected to the portion of routing line 30 that extends from the side of enlarged annular region 34 opposite to enlarged circular region 36, current is applied to the plating bus from an external power source, and the assembly is submerged in an electrolytic copper plating bath such as Sel-Rex CUBATH M™ at room temperature. As a result, connection joint 60 begins to electroplate (or grow) on conductive trace 54, including inside through-hole 52, but not on pad 16 since it is not connected to the plating bus. However, as the electroplating operation continues, connection joint 60 extends through opening 56 in adhesive 40 and contacts pad 16, thereby connecting pad 16 to the plating bus. As a result, connection joint 60 also begins to plate on pad 16. Advantageously, after contact between connection joint 60 and pad 16 occurs, connection joint 60 begins to plate on the entire central region of pad 16 directly beneath through-hole 52. The electroplating operation continues until connection joint 60 has the desired thickness, such as 10 to 25 microns. After the electroplating operation is completed, connection joint 60 has a bowl-shape inside through-hole 52, is the only electrical conductor in through-hole 52, and provides a robust, permanent electrical connection between pad 16 and conductive trace 54. After the assembly is removed from the electrolytic bath it is rinsed in distilled water to remove contaminants.

FIGS. 1M, 2M and 3M are cross-sectional, top and bottom views, respectively, of the partially completed assembly after photoresist layer 44 is stripped.

FIGS. 1N, 2N and 3N are cross-sectional, top and bottom views, respectively, of insulative base 62 formed over routing line 30 and through-hole 52. Insulative base 62 is relatively flat and has a thickness of 50 microns. Insulative base 62 contacts and adheres to adhesive 40 and connection joint 60. Although insulative base 62 covers routing line 30 and through-hole 52 and a lower portion of pillar 50, an upper portion of pillar 50 extends 75 microns above insulative base 62. Thus, insulative base 62 does not extend to top surface 22 or bottom surface 24. Preferably, insulative base 62 is initially an epoxy in paste form that includes an epoxy resin, a curing agent, an accelerator and a filler. The filler is an inert material, such as silica (powdered fused quartz), that improves thermal conductivity, thermal shock resistance, and thermal coefficient of expansion matching. The epoxy paste is selectively coated over routing line 30 but not top surface 22 using screen printing, and then the epoxy is cured or hardened at relatively low temperature in the range of 100-250° C. to form a solid adherent insulative layer that provides additional mechanical strength for the support circuit and protection for connection joint 60 in the vicinity of pad 16 and through-hole 52.

At this stage, the manufacture of support circuit 64, which includes conductive trace 54 and insulative base 62, can be considered complete. Support circuit 64 is mechanically and electrically coupled to chip 10 by adhesive 40 and connection joint 60, respectively, to form a semiconductor chip assembly. Support circuit 64 includes other conductive traces embedded in insulative base 62, and only a single conductive trace 54 is shown for convenience of illustration. The conductive traces are each connected to a respective pad on chip 10 by a respective connection joint in a respective through-hole. If desired, solder balls can be screen printed on the tops of the pillars to provide connections to the next level assembly. Finally, chip 10 is singulated from other chips on the wafer, thereby singulating the assembly from other assemblies, so that the assembly forms a chip size package.

The conductive traces are electrically isolated from one another by insulative base 62. The conductive traces can be severed from one another during singulation if they are not connected by plating bus circuitry on chip 10. However, the plating bus and related circuitry on chip 10 can be disconnected or severed from conductive trace 54 after forming connection joint 60 but before forming insulative base 62 using an additional photolithography step in order to reduce stress at the interface of pad 16 and connection joint 60 that might otherwise occur if conductive trace 54 is severed at the edge of chip 10 during singulation.

FIGS. 4A-4R, 5A-5R and 6A-6R are cross-sectional, top and bottom views, respectively, of a method of manufacturing a semiconductor chip assembly in accordance with another embodiment of the present invention. In this embodiment, the chip is singulated from other chips on the wafer before it is attached to the copper foil, and the semiconductor chip assembly is a grid array rather than a chip size package. For purposes of brevity, any description in the previous embodiment is incorporated herein insofar as the same is applicable, and the same description need not be repeated. Likewise, elements of the current embodiment similar to those in the previous embodiment have corresponding reference numerals indexed at one-hundred rather than zero. For instance, chip 110 corresponds to chip 10, copper foil 120 corresponds to copper foil 20, etc.

FIGS. 4A-4H, 5A-5H and 6A-6H depict manufacturing steps generally similar to those in FIGS. 1A-1H, 2A-2H and 3A-3H, except as follows.

First, chip 110 is singulated from other chips on the wafer before it is mechanically attached to copper foil 120 by adhesive 140.

Second, routing line 130 does not extend from the side of enlarged annular region 134 opposite to enlarged circular region 136. In the previous embodiment, routing line 30 extends from the side of enlarged annular region 34 opposite to enlarged circular region 36 to reach a plating bus so that connection joint 60 can be formed by electroplating. In the current embodiment, routing line 130 need not extend to an external plating bus since, as described below, conductive trace 154 is not separated from the other conductive traces in copper foil 120 when connection joint 160 is formed. In other words, when connection joint 160 is formed, the etch that forms the pillars and separates the conductive traces from one another has yet to be performed, the plating bus is connected to top surface 122 of copper foil 120, and the plating current is available to all regions of copper foil 120. As a result, the individual routing lines need not extend to a plating bus at the edge of chip 110 because the 125 micron thick upper portion of copper foil 120 is still integral with the routing lines when the connection joints are formed. Advantageously, routing line 130 need not extend to and be exposed at the edge of the assembly, or have a portion at the edge of the assembly removed by a separate photolithography step.

Third, chip 110 has a smaller surface area than that of copper foil 120 and is positioned within the surface area of copper foil 120 (or support circuit 164), as is conventional for BGA and LGA packages.

Fourth, encapsulant 142 contacts and protects the outer edges of chip 110. In the previous embodiment, the four outer edges of chip 10 are not exposed until singulation occurs. In the current embodiment, the four outer edges of chip 110 between top surface 112 and bottom surface 114 are exposed when encapsulant 142 is applied, chip 110 is positioned within the surface area of copper foil 120, and encapsulant 142 contacts the outer edges and bottom surface 114 of chip 110 and the surface of adhesive 140 opposite to copper foil 120 and outside chip 110. Advantageously, encapsulant 142 provides environmental protection for the outer edges as well as bottom surface 114 of chip 110.

FIGS. 4I, 5I and 6I are cross-sectional, top and bottom views, respectively, of photoresist layer 170 formed on top surface 122 of copper foil 120. Photoresist layer 170 is deposited as a continuous layer and then patterned by selectively applying light through a reticle (not shown), applying a developer solution to remove the photoresist portions rendered soluble by the light, and then hard baking, as is conventional. As a result, photoresist layer 170 contains an opening that selectively exposes portion 172 of top surface 122. Photoresist layer 170 has a thickness of 10 microns.

FIGS. 4J, 5J and 6J are cross-sectional, top and bottom views, respectively, of the partially completed assembly after opening 174 is formed in copper foil 120, first portion 176A of routing line 130 is formed, and dimple 132 is converted into through-hole 152 in routing line 130. First portion 176A of routing line 130 and through-hole 152 are formed by applying a front-side wet chemical etch to portion 172 of top surface 122 in a similar manner to the front-side wet chemical etch in the previous embodiment. Therefore, no appreciable amount of adhesive 140 or encapsulant 142 is removed. Since the portion of copper foil 120 directly above first portion 176A of routing line 130 and dimple 132 was 125 microns, the wet chemical etch forms a top surface of first portion 176A of routing line 130 that is contiguous with the outer edges of routing line 130 and converts dimple 132 into through-hole 152 that extends between the top and bottom surfaces of routing line 130. Of importance, the wet chemical etch does not form separate conductive traces in copper foil 120. Rather, routing line 130 remains connected to and integral with the other regions of copper foil 120, including other routing lines with through-holes aligned with corresponding pads on chip 110.

FIGS. 4K, 5K and 6K are cross-sectional, top and bottom views, respectively, of opening 156 formed in adhesive 140 by applying a selective laser etch. The combination of through-hole 152 and opening 156 expose pad 116.

FIGS. 4L, 5L and 6L are cross-sectional, top and bottom views, respectively, of the partially completed assembly after connection joint 160 is formed by electroplating. Connection joint 160 is formed in through-hole 152 and opening 156, and contacts and electrically connects pad 116 and routing line 130. Connection joint 160 covers first portion 176A of routing line 130 and the sidewalls of opening 174.

FIGS. 4M, 5M and 6M are cross-sectional, top and bottom views, respectively, of the partially completed assembly after photoresist layer 172 is stripped.

FIGS. 4N, 5N and 6N are cross-sectional, top and bottom views, respectively, of first insulative base portion 162A formed on the bottom of opening 174. First insulative base portion 162A is relatively flat and has a thickness of 20 microns. First insulative base portion 162A contacts and adheres to aesive 140 and connection joint 160, and covers first portion 176A of routing line 130 and through-hole 152. However, first insulative base portion 162A does not extend to top surface 122 or bottom surface 124. Preferably, first insulative base portion 162A is initially an epoxy in paste form that includes an epoxy resin, a curing agent, an accelerator and a filler such as silica. The epoxy paste is selectively coated into opening 174 but not on top surface 122 using screen printing, and then the epoxy is cured or hardened at relatively low temperature in the range of 100-250° C. to form a solid adherent insulative layer that provides protection for connection joint 160 in the vicinity of pad 116 and through-hole 152.

FIGS. 4O, 5O and 6O are cross-sectional, top and bottom views, respectively, of photoresist layer 144 formed on top surface 122 of copper foil 120. Photoresist layer 144 is deposited as a continuous layer and then patterned by selectively applying light through a reticle (not shown), applying a developer solution to remove the photoresist portions rendered soluble by the light, and then hard baking, as is conventional. As a result, photoresist layer 144 contains an opening that selectively exposes portion 146 of copper foil 120 and first insulative base portion 162A. Photoresist layer 144 has a thickness of 10 microns.

FIGS. 4P, 5P and 6P are cross-sectional, top and bottom views, respectively, of the partially completed assembly after pillar 150 is formed in copper foil 120, and second portion 176B of routing line 130 is formed. Pillar 150 and second portion 176B of routing line 130 are formed by applying a front-side wet chemical etch in a similar manner to the front-side wet chemical etch in the previous embodiment. Therefore, no appreciable amount of adhesive 140, encapsulant 142 or first insulative base portion 162A is removed. Since the portion of copper foil 120 directly above second portion 176B of routing line 130 was 125 microns, the wet chemical etch forms a top surface of second portion 176B of routing line 130 that is contiguous with the outer edges of routing line 130 and adjacent to pillar 150. Of importance, the wet chemical etch forms separate conductive traces in copper foil 120. Routing line 130 and pillar 150 form conductive trace 154 that is separate from and electrically isolated from other conductive traces in what remains of copper foil 120. Moreover, first insulative base portion 162A protects the underlying portion of connection joint 160 from the wet chemical etch, thereby assuring a robust metallurgical connection between pad 116 and routing line 130. Pillar 150 is horizontally offset from through-hole 152, and routing line 130 provides horizontal routing (fan-in or fan-out) between pillar 150 and through-hole 152 by first portion 176A, which is adjacent to through-hole 152, and second portion 176B, which is adjacent to pillar 150 and first portion 176A. At this stage, adhesive 140 provides critical mechanical support for conductive trace 154.

FIGS. 4Q, 5Q and 6Q are cross-sectional, top and bottom views, respectively, of the partially completed assembly after photoresist layer 144 is stripped.

FIGS. 4R, 5R and 6R are cross-sectional, top and bottom views, respectively, of second insulative base portion 162B formed on first insulative base portion 162A, second portion 176B of routing line 130, and a lower portion of pillar 150 but not an upper portion of pillar 150. The combination of first and second insulative base portions 162A and 162B form insulative base 162 which is relatively flat, has a thickness of 50 microns, and does not extend to top surface 122 or bottom surface 124. Preferably, second insulative base portion 162B is initially an epoxy in paste form that includes an epoxy resin, a curing agent, an accelerator and a filler such as silica. The epoxy paste is selectively coated onto routing line 130 but not top surface 122 using screen printing, and then the epoxy is cured or hardened at relatively low temperature in the range of 100-250° C. to form a solid adherent insulative layer that provides additional mechanical strength for the support circuit.

At this stage, the manufacture of support circuit 164, which includes conductive trace 154 and insulative base 162, can be considered complete. Support circuit 164 is mechanically and electrically coupled to chip 110 by adhesive 140 and connection joint 160, respectively, to form a semiconductor chip assembly. If desired, solder balls can be screen printed on the tops of the pillars to provide connections to the next level assembly.

The semiconductor chip assemblies described above are merely exemplary. Numerous other embodiments are contemplated.

The conductive trace can have various shapes and sizes and can be various conductive metals including copper, gold, nickel, aluminum, tin, combinations thereof, and alloys thereof. Of common metallic materials, copper has especially low resistivity and cost. Furthermore, those skilled in the art will understand that in the context of a support circuit, a copper conductive trace is typically a copper alloy that is mostly copper but not pure elemental copper, such copper-zirconium (99.9% copper), copper-silver-phosphorus-magnesium (99.7% copper), or copper-tin-iron-phosphorus (99.7% copper). If desired, the conductive trace can be spot plated near the through-hole to make it compatible with receiving the connection joint. The conductive trace may function as a signal, power or ground layer depending on the purpose of the associated chip pad. The conductive trace need not necessarily extend above the top surface of the insulative base, and the top portion of the conductive trace can be a ball, a pad, or a pillar (columnar post). A pillar is particularly well-suited for reducing thermal mismatch related stress in the next level assembly.

The pad can have numerous shapes including a flat rectangular shape and a bumped shape. For instance, a bump-shaped pad may extend into the through-hole and may even extend above the routing line. The pad can either be partially or completely exposed by the through-hole prior to forming the connection joint. The pad can have a length and width that are larger than, equal to, or smaller than the diameter of the through-hole. Preferably, the pad and through-hole have the same or similar size, and essentially all of the pad is directly beneath the through-hole.

The pillar and the through-hole can have a circular, ovular, square, rectangular or other shape (as viewed from the top surface of the support circuit). Furthermore, the pillar and through-hole sidewalls may have a wide variety of shapes and slopes including vertical sidewalls, tapered sidewalls, continuous sidewalls and stepped sidewalls.

Preferably, the insulative base has a thickness of 25 to 50 microns, the routing line has a width of 10 to 100 microns and a thickness of 10 to 40 microns, the pillar has a diameter of 300 to 500 microns that decreases with increasing height, a height of 150 to 300 microns and extends 50 to 250 microns above the insulative base, and the through-hole has a diameter of 50 to 100 microns. Of course, other dimensions are suitable.

The insulative base may be rigid or flexible, and may be formed from numerous organic or inorganic insulators such as tape (polyimide), epoxy, silicone, glass (aramid) and ceramic. Organic insulators are preferred for low cost, high dielectric applications, whereas inorganic insulators are preferred when high thermal dissipation and a matched thermal coefficient of expansion are important. The insulative base can be deposited only on the routing line, or alternatively, deposited over the pillar and the routing line and then etched back so that a top portion of the pillar is exposed.

Numerous adhesives can be applied between the chip and the support circuit. For instance, the adhesive can be applied as a paste, a laminated layer, or a liquid applied by screen-printing, spin-on, or spray-on. If a paste or liquid adhesive is applied, the adhesive may fill the dimple or through-hole and be subsequently removed. If a laminated adhesive is applied then no appreciable amount of adhesive may reside inside the dimple or through-hole. Thermosetting adhesive liquids and pastes are generally suitable. Likewise, thermoplastic adhesives such as a polyamic acid liquid resin that is cured to form a polyimide film are generally suitable.

Numerous etches can be applied to form the routing line and the pillar as well as the dimple, the through-hole and the opening in the adhesive. For instance, the opening in the adhesive can be formed by laser direct write (without a mask) or a plasma etch. In addition, these etches can be performed in various sequences. For instance, the front-side etch that forms the pillar can be applied before or after the connection joint is formed.

The connection joint can be formed from a wide variety of materials including copper, gold, nickel, palladium, tin, alloys thereof, and combinations thereof, can be formed by a wide variety of processes including electroplating, electroless plating, ball bonding and solder reflow, and can have a wide variety of shapes and sizes. The choice between a connection joint that partially or completely fills the through-hole and the shape of the connection joint depends on design and reliability considerations. Further details regarding an electroplated connection joint are disclosed in U.S. application Ser. No. 09/643,212, filed Aug. 22, 2000 by Charles W. C. Lin entitled “Semiconductor Chip Assembly with Simultaneously Electroplated Contact Terminal and Connection Joint” which is incorporated by reference. Further details regarding an electrolessly plated connection joint are disclosed in U.S. application Ser. No. 09/643,214, filed Aug. 22, 2000 by Charles W. C. Lin entitled “Semiconductor Chip Assembly with Simultaneously Electrolessly Plated Contact Terminal and Connection Joint” which is incorporated by reference. Further details regarding a ball bond connection joint are disclosed in U.S. application Ser. No. 09/665,928, filed Sep. 20, 2000 by Charles W. C. Lin entitled “Semiconductor Chip Assembly with Ball Bond Connection Joint” which is incorporated by reference.

After the connection joint is formed, if a plating bus exists then it is disconnected from the conductive trace. The plating bus can be disconnected by mechanical sawing, laser cutting, chemical etching, and combinations thereof. If the plating bus is disposed about the periphery of the assembly but is not integral to the assembly, then the plating bus can be disconnected when the assembly is singulated from other assemblies. However, if the plating bus is integral to the assembly, then prior to singulation a photolithography step can be added to selectively cut related circuitry on the assembly that is dedicated to the plating bus since this circuitry would otherwise short the conductive traces together.

After the insulative base is formed, further encapsulation can be performed but is generally not necessary. In particular, it is usually not necessary to deposit an insulator over the insulative base. However, in the event the insulative base is thin, it may be desirable to provide an encapsulant to enhance the mechanical strength of the support circuit.

After the insulative base is formed, a soldering material or solder ball can be deposited over the pillar by plating or printing or placement techniques if required for the next level assembly. However, the next level assembly may not require that the semiconductor chip assembly contain solder. For instance, in land grid array (LGA) packages, the soldering material is normally provided by the panel rather than the contact terminals on the semiconductor chip assembly.

The working format for the semiconductor chip assembly can be a single chip, a wafer, a strip or a panel based on the manufacturing design. For instance, when the working format is a wafer, numerous support circuits are simultaneously batch manufactured on a single wafer and then separated from one another during singulation. As another example, when the working format is a strip (or reel-to-reel) form, the chips are individually attached to the strip. Semiconductor chip assemblies manufactured using a strip can be chip size packages, ball grid arrays, or other structures. The wafer-based approach employs fewer steps and is less time consuming than the strip-based approach, however the strip-based approach is easier to control and has better dimensional stability than the wafer-based approach since aligning the dimples with the pads involves a single chip rather than the entire wafer.

Advantageously, the semiconductor chip assembly of the present invention is reliable and inexpensive. The insulative base protects the conductive trace from handling damage, provides a known dielectric barrier for the conductive trace, and prevents solder reflow at the top surface of the support circuit from contacting or electrically shorting the underlying routing line. The tapered pillar yields enhanced reliability for the next level assembly that exceeds that of conventional BGA packages. The mode of the connection shifts from the initial mechanical coupling to metallurgical coupling to assure sufficient metallurgical bond strength. Furthermore, the support circuit can provide mechanical and metallurgical coupling with the chip without TAB, flip-chip bonding, polishing, or solder joints. As a result, the assembly of the present invention significantly enhances throughput, yield and performance characteristics compared to conventional packaging techniques. Moreover, the assembly of the present invention is well-suited for use with materials compatible with copper chip and lead-free environmental requirements.

Various changes and modifications to the presently preferred embodiments described herein will be apparent to those skilled in the art. For instance, the materials, dimensions and shapes described above are merely exemplary. Such changes and modifications may be made without departing from the spirit and scope of the present invention as defined in the appended claims. 

I claim:
 1. A method of manufacturing a semiconductor chip assembly, comprising: providing a semiconductor chip and a conductive metal, wherein the chip includes a conductive pad, the conductive metal is a single metallic material that includes a dimple, and the pad is aligned with the dimple; etching the conductive metal on a side opposite the dimple such that the dimple forms a through-hole in the conductive metal; and forming a connection joint in the through-hole that electrically connects the conductive metal and the pad.
 2. The method of claim 1, including mechanically attaching the chip to the conductive metal using an adhesive before forming the through-hole.
 3. The method of claim 2, including forming an opening in the adhesive directly beneath the through-hole thereby exposing the pad after mechanically attaching the chip to the conductive metal and before forming the connection joint.
 4. The method of claim 1, including etching the conductive metal to form the dimple.
 5. The method of claim 1, including etching the conductive metal on the opposite side to form a pillar in the conductive metal.
 6. The method of claim 5, including forming the connection joint before forming the pillar.
 7. The method of claim 5, including forming the connection joint after forming the pillar.
 8. The method of claim 1, wherein forming the connection joint includes plating metal on the conductive metal and the pad.
 9. The method of claim 1, wherein the conductive metal is a continuous strip of copper.
 10. The method of claim 1, wherein the assembly is a chip size package.
 11. A method of manufacturing a semiconductor chip assembly, comprising: providing a semiconductor chip that includes a conductive pad; providing a conductive metal that is a single metallic material and includes a dimple; then disposing an adhesive between the chip and the conductive metal, thereby mechanically attaching the chip to the conductive metal such that the pad is aligned with the dimple and the adhesive covers the pad; then etching partially but not completely through the conductive metal on a side opposite the dimple, thereby removing a portion of the conductive metal directly above the dimple and forming a recessed portion in the conductive metal that surrounds the dimple such that the dimple provides a through-hole in the recessed portion; then forming an opening in the adhesive below the through-hole; exposing the pad through the opening and the through-hole; and then forming a connection joint in the through-hole that extends through the opening and electrically connects the conductive metal and the pad.
 12. The method of claim 11, including etching partially but not completely through the conductive metal to form the dimple and outer edges of a routing line, wherein etching partially but not completely through the conductive metal on the opposite side removes a portion of the conductive metal directly above the routing line.
 13. The method of claim 11, wherein disposing the adhesive includes providing the adhesive in the dimple, and forming the opening includes removing the adhesive in the through-hole.
 14. The method of claim 11, wherein forming the opening in the adhesive includes applying a laser etch.
 15. The method of claim 14, wherein the laser etch is blocked by the routing line and the pad.
 16. The method of claim 14, wherein the laser etch includes projection laser ablation.
 17. The method of claim 11, wherein the pad includes a central region directly beneath the through-hole and a peripheral region not directly beneath the through-hole, the opening and the through-hole expose the central region without exposing the peripheral region, and the connection joint contacts the central region without contacting the peripheral region.
 18. The method of claim 11, wherein all of the pad is directly beneath the through-hole, the opening and the through-hole expose all of the pad, and the connection joint contacts all of the pad.
 19. The method of claim 11, including encapsulating the chip after mechanically attaching the chip to the conductive metal and before etching partially but not completely through the conductive metal.
 20. The method of claim 11, including etching the conductive metal on the opposite side to form a pillar in the conductive metal, and forming an insulative base over the routing line, the through-hole and a lower portion of the pillar but not over an upper portion of the pillar.
 21. The method of claim 20, including forming the recessed portion and the pillar simultaneously.
 22. The method of claim 20, including forming the recessed portion before forming the pillar.
 23. The method of claim 20, including forming the connection joint before forming the pillar.
 24. The method of claim 20, including forming the connection joint after forming the pillar.
 25. The method of claim 20, wherein the pillar has a flat top surface and a diameter that is narrowest at the top surface.
 26. The method of claim 20, wherein the pillar extends a first distance above the recessed portion, the insulative base extends a second distance above the recessed portion, and the first distance is at least twice the second distance.
 27. The method of claim 20, wherein the pillar extends at least 100 microns above the insulative base.
 28. The method of claim 20, wherein the conductive metal is copper and the insulative base is epoxy.
 29. The method of claim 11, wherein the assembly is devoid of wire bonds, TAB leads and solder joints.
 30. The method of claim 11, wherein the assembly is a chip size package.
 31. A method of manufacturing a semiconductor chip assembly, comprising the following steps in the sequence set forth: disposing an insulative adhesive between a chip and a conductive metal, thereby mechanically attaching the chip to the conductive metal, wherein the chip includes upper and lower surfaces, the upper surface includes a pad, the conductive metal is a single metallic material that includes top and bottom surfaces, the bottom surface includes a dimple, the adhesive contacts the upper and bottom surfaces, and the dimple is aligned with the pad; applying an etch to a portion of the top surface, thereby etching partially but not completely through a thickness of the conductive metal and removing a portion of the conductive metal directly above the dimple and forming a routing line in the conductive metal that extends above the bottom surface and surrounds the dimple such that the dimple provides a through-hole in the routing line; applying an etch to the adhesive that forms an opening in the adhesive and removes any of the adhesive in the dimple, thereby exposing the pad through the through-hole and the opening; forming a connection joint inside the through-hole and the opening that contacts and electrically connects the conductive metal and the pad; and forming an insulative base over the routing line and the through-hole.
 32. The method of claim 31, including applying an etch that forms a pillar in the opposite side of the conductive metal that extends to the top surface.
 33. The method of claim 32, including forming the pillar before forming the connection joint.
 34. The method of claim 32, including forming the pillar after forming the connection joint.
 35. The method of claim 32, including forming the pillar before forming the insulative base, wherein forming the insulative base includes simultaneously disposing the insulative base over the routing line and the through-hole and a lower portion of the pillar without disposing the insulative base over an upper portion of the pillar.
 36. The method of claim 32, including forming the pillar after partially forming the insulative base, wherein forming the insulative base includes disposing a first portion of the insulative base over the routing line and the through-hole after forming the connection joint and before forming the pillar, and then disposing a second portion of the insulative base over the first portion of the insulative base and a lower portion of the pillar without disposing the second portion of the insulative base over an upper portion of the pillar.
 37. The method of claim 31, including applying an etch to a portion of the bottom surface, thereby etching partially but not completely through a thickness of the conductive metal to form the dimple and outer edges of the routing line.
 38. The method of claim 31, including encapsulating the chip using an encapsulant that contacts the lower surface of the chip after mechanically attaching the chip to the conductive metal and before applying the etch to the portion of the top surface.
 39. The method of claim 31, wherein the assembly is devoid of wire bonds, TAB leads and solder joints.
 40. The method of claim 31, wherein the assembly is a chip size package.
 41. A method of manufacturing a semiconductor chip assembly, comprising: providing a conductive metal layer with top and bottom surfaces, wherein the conductive metal layer is a single metallic material; providing a bottom etch mask under the bottom surface, wherein the bottom etch mask includes an opening that exposes a portion of the bottom surface; applying an etch to the exposed portion of the bottom surface through the opening in the bottom etch mask, thereby etching partially but not completely through the conductive metal layer to form outer edges of a routing line that extends to the bottom surface and a dimple in the bottom surface that extends through the routing line and is covered by the conductive metal layer; removing the bottom etch mask; mechanically attaching a chip to the conductive metal layer without contacting the chip to the conductive metal layer using an insulative adhesive, wherein the chip includes upper and lower surfaces, the upper surface includes a pad, the dimple is aligned with the pad, and the adhesive contacts the upper and bottom surfaces; providing a top etch mask over the top surface, wherein the top etch mask includes an opening that exposes a portion of the top surface; applying an etch to the exposed portion of the top surface through the opening in the top etch mask, thereby etching partially but not completely through the conductive metal layer and removing a portion of the conductive metal layer above the routing line and the dimple to form a top surface of the routing line such that the dimple becomes a through-hole in the routing line; applying an etch to the through-hole that is highly selective of the adhesive with respect to the routing line, thereby removing the adhesive in the through-hole and forming an opening in the adhesive beneath the through-hole thereby exposing the pad through the opening in the adhesive and the through-hole; forming a connection joint in the through-hole that extends through the opening in the adhesive and contacts and electrically connects the routing line and the pad; and forming an insulative base over the routing line and the through-hole, wherein the top surface extends above the insulative base.
 42. The method of claim 41, including encapsulating the chip using an encapsulant that contacts the lower surface of the chip after mechanically attaching the chip to the conductive metal layer and before providing the top etch mask.
 43. The method of claim 41, wherein applying the etch to the exposed portion of the bottom surface removes a first thickness of the conductive metal layer, applying the etch to the exposed portion of the top surface removes a second thickness of the conductive metal layer, and the second thickness is at least twice the first thickness.
 44. The method of claim 41, wherein the insulative base contacts the connection joint and the adhesive.
 45. The method of claim 41, wherein applying the etch to the through-hole includes applying a laser that ablates the adhesive in and directly beneath the through-hole.
 46. The method of claim 41, wherein forming the connection joint includes plating a metal onto the routing line and the pad.
 47. The method of claim 41, wherein forming the connection joint includes wire bonding a ball bond onto the routing line and the pad.
 48. The method of claim 41, wherein the steps are performed in the sequence set forth.
 49. The method of claim 41, wherein the assembly is devoid of TAB leads and solder joints.
 50. The method of claim 41, wherein the conductive metal layer is a copper foil and the insulative base is epoxy.
 51. A method of manufacturing a semiconductor chip assembly, comprising: providing a conductive metal layer with top and bottom surfaces, wherein the conductive metal layer is a single metallic material; providing a bottom etch mask under the bottom surface, wherein the bottom etch mask includes an opening that exposes a portion of the bottom surface; applying an etch to the exposed portion of the bottom surface through the opening in the bottom etch mask, thereby etching partially but not completely through the conductive metal layer to form outer edges of a routing line and a dimple that extends through the routing line and is covered by the conductive metal layer; removing the bottom etch mask; mechanically attaching a chip to the conductive metal layer using an insulative adhesive, wherein the chip includes upper and lower surfaces, the adhesive contacts the upper and bottom surfaces, the upper surface includes a pad, and the dimple is aligned with the pad; providing a top etch mask over the top surface, wherein the top etch mask includes an opening that exposes a portion of the top surface; applying an etch to the exposed portion of the top surface through the opening in the top etch mask, thereby etching partially but not completely through the conductive metal layer and removing a portion of the conductive metal layer above the routing line and the dimple to form a pillar that extends to the top surface and a top surface of the routing line such that the dimple becomes a through-hole in the routing line; applying an etch to the through-hole that is highly selective of the adhesive with respect to the routing line and the pad, thereby removing the adhesive in the through-hole and forming an opening in the adhesive beneath the through-hole such that the through-hole and the opening in the adhesive expose the pad; forming a connection joint in the through-hole that extends through the opening in the adhesive and contacts and electrically connects the routing line and the pad; and forming an insulative base over the routing line and the through-hole, wherein the pillar extends above the insulative base.
 52. The method of claim 51, including encapsulating the chip using an encapsulant that contacts the lower surface of the chip after mechanically attaching the chip to the conductive metal layer and before providing the top etch mask.
 53. The method of claim 51, wherein applying the etch to the exposed portion of the bottom surface removes a first thickness of the conductive metal layer, applying the etch to the exposed portion of the top surface removes a second thickness of the conductive metal layer, and the second thickness is at least twice the first thickness.
 54. The method of claim 51, wherein forming the connection joint includes plating a metal onto the routing line and the pad.
 55. The method of claim 54, wherein forming the connection joint includes simultaneously plating a metal onto the pillar, the routing line and the pad such that the plated metal outside the pad extends along a sidewall of the pillar to the top surface.
 56. The method of claim 51, wherein the steps are performed in the sequence set forth.
 57. The method of claim 51, wherein the method excludes polishing.
 58. The method of claim 51, wherein the conductive metal layer is copper and the insulative base is epoxy.
 59. The method of claim 51, wherein the assembly is devoid of wire bonds, TAB leads, and solder joints.
 60. The method of claim 51, wherein the assembly is a chip size package.
 61. A method of manufacturing a semiconductor chip assembly, comprising: providing a conductive metal layer with top and bottom surfaces, wherein the conductive metal layer is a single metallic material; providing a bottom etch mask under the bottom surface, wherein the bottom etch mask includes an opening that exposes a portion of the bottom surface; applying an etch to the exposed portion of the bottom surface through the opening in the bottom etch mask, thereby etching partially but not completely through the conductive metal layer to form outer edges of a routing line and a dimple that extends through the routing line and is covered by the conductive metal layer; removing the bottom etch mask; mechanically attaching a chip to the conductive metal layer using an insulative adhesive, wherein the chip includes upper and lower surfaces, the adhesive contacts the upper and bottom surfaces, the upper surface includes a pad, and the dimple is aligned with the pad; providing a first top etch mask over the top surface, wherein the first top etch mask includes an opening that exposes a first portion of the top surface; applying an etch to the exposed first portion of the top surface through the opening in the first top etch mask, thereby etching partially but not completely through the conductive metal layer and removing a portion of the conductive metal layer above the routing line and the dimple to form a first portion of a top surface of the routing line such that the dimple becomes a through-hole in the routing line; applying an etch to the through-hole that is highly selective of the adhesive with respect to the routing line and the pad, thereby removing the adhesive in the through-hole and forming an opening in the adhesive beneath the through-hole such that the through-hole and the opening in the adhesive expose the pad; forming a connection joint in the through-hole that extends through the opening in the adhesive and contacts and electrically connects the routing line and the pad; forming a first portion of an insulative base over the first portion of the top surface of the routing line and over the through-hole; providing a second top etch mask over the top surface of the conductive metal layer, wherein the second top etch mask includes an opening that exposes a second portion of the top surface of the conductive metal layer; applying an etch to the exposed second portion of the top surface of the conductive metal layer through the opening in the second top etch mask, thereby etching partially but not completely through the conductive metal layer and removing a portion of the conductive metal layer above the routing line to form a pillar that extends to the top surface of the conductive metal layer and a second portion of a top surface of the routing line that extends between the pillar and the first portion of the top surface of the routing line; and forming a second portion of the insulative base over the first portion of the insulative base and the second portion of the top surface of the routing line and a lower portion of the pillar and not over an upper portion of the pillar.
 62. The method of claim 61, including encapsulating the chip using an encapsulant that contacts the lower surface and outer edges of the chip and the adhesive after mechanically attaching the chip to the conductive metal layer and before providing the top etch mask.
 63. The method of claim 61, wherein applying the etch to the exposed portion of the bottom surface removes a first thickness of the conductive metal layer, applying the etch to the exposed first portion of the top surface removes a second thickness of the conductive metal layer and the second thickness is at least twice the first thickness, and applying the etch to the exposed second portion of the top surface removes a third thickness of the conductive metal layer and the third thickness is at least twice the first thickness.
 64. The method of claim 61, wherein forming the connection joint includes plating a metal onto the routing line and the pad.
 65. The method of claim 61, wherein forming the connection joint includes simultaneously plating the metal onto the routing line and the pad such that the plated metal outside the pad extends to the top surface.
 66. The method of claim 61, wherein the steps are performed in the sequence set forth.
 67. The method of claim 61, wherein the method excludes polishing.
 68. The method of claim 61, wherein the conductive metal layer is copper and the insulative base is epoxy.
 69. The method of claim 61, wherein the assembly is devoid of wire bonds, TAB leads, and solder joints.
 70. The method of claim 61, wherein the assembly is a grid array package. 